diff --git a/compiler/src/fast_build/meomry_monitor/rollup-plugin-memory-monitor.ts b/compiler/src/fast_build/meomry_monitor/rollup-plugin-memory-monitor.ts
index ec6b56a9c0a3d423a87e578470b5bda8a5ab2def..46af4ed3ebef58882d798fff6bf9ece81e9a9dca 100644
--- a/compiler/src/fast_build/meomry_monitor/rollup-plugin-memory-monitor.ts
+++ b/compiler/src/fast_build/meomry_monitor/rollup-plugin-memory-monitor.ts
@@ -218,6 +218,10 @@ export function memoryMonitor(): MemoryMonitorLifecycle {
       handler(): void {
         const memoryMonitorInstance: MemoryMonitor = MemoryMonitor.getInstance();
         memoryMonitorInstance.stop();
+        const cleanUpTimeout = (projectConfig.memoryDottingWriteFileInterval ?? 1000) * 2;
+        setTimeout(() => {
+          memoryMonitorInstance.cleanUp();
+        }, cleanUpTimeout);
       },
     },
   };