diff --git a/compiler/src/fast_build/ark_compiler/utils.ts b/compiler/src/fast_build/ark_compiler/utils.ts
index d30a45c45f461a808fd8290c984bd50c290e1f74..fb7272e1547d2c3497d92ad13bc0ecf0bb5d16c0 100644
--- a/compiler/src/fast_build/ark_compiler/utils.ts
+++ b/compiler/src/fast_build/ark_compiler/utils.ts
@@ -43,6 +43,7 @@ import {
 import {
   tryMangleFileName,
   writeObfuscatedSourceCode,
+  writeFileSyncCaseAware,
 } from '../../ark_utils';
 import { AOT_FULL, AOT_PARTIAL, AOT_TYPE } from '../../pre_define';
 import { SourceMapGenerator } from './generate_sourcemap';
@@ -185,7 +186,7 @@ export async function writeFileContentToTempDir(id: string, content: string, pro
     case EXTNAME_JSON:
       const newFilePath: string = tryMangleFileName(filePath, projectConfig, id, projectConfig.isBytecodeObfEnabled);
       mkdirsSync(path.dirname(newFilePath));
-      fs.writeFileSync(newFilePath, content ?? '');
+      writeFileSyncCaseAware(newFilePath, content ?? '');
       break;
     default:
       break;
@@ -208,7 +209,7 @@ async function writeFileContent(sourceFilePath: string, filePath: string, conten
     return;
   }
   mkdirsSync(path.dirname(filePath));
-  fs.writeFileSync(filePath, content, 'utf-8');
+  writeFileSyncCaseAware(filePath, content, 'utf-8');
 }
 
 export function getEs2abcFileThreadNumber(): number {
diff --git a/compiler/src/interop/src/fast_build/ark_compiler/utils.ts b/compiler/src/interop/src/fast_build/ark_compiler/utils.ts
index 71ab93ef0cb2e9eddd33dd1a5716b3ee2bd205fb..24aa9a6bed755c61d9773989991a5c8a70fa59a1 100644
--- a/compiler/src/interop/src/fast_build/ark_compiler/utils.ts
+++ b/compiler/src/interop/src/fast_build/ark_compiler/utils.ts
@@ -44,6 +44,7 @@ import {
 import {
   tryMangleFileName,
   writeObfuscatedSourceCode,
+  writeFileSyncCaseAware,
 } from '../../ark_utils';
 import { AOT_FULL, AOT_PARTIAL, AOT_TYPE } from '../../pre_define';
 import { SourceMapGenerator } from './generate_sourcemap';
@@ -186,7 +187,7 @@ export async function writeFileContentToTempDir(id: string, content: string, pro
     case EXTNAME_JSON:
       const newFilePath: string = tryMangleFileName(filePath, projectConfig, id, projectConfig.isBytecodeObfEnabled);
       mkdirsSync(path.dirname(newFilePath));
-      fs.writeFileSync(newFilePath, content ?? '');
+      writeFileSyncCaseAware(newFilePath, content ?? '');
       break;
     default:
       break;
@@ -209,7 +210,7 @@ async function writeFileContent(sourceFilePath: string, filePath: string, conten
     return;
   }
   mkdirsSync(path.dirname(filePath));
-  fs.writeFileSync(filePath, content, 'utf-8');
+  writeFileSyncCaseAware(filePath, content, 'utf-8');
 }
 
 export function getEs2abcFileThreadNumber(): number {
diff --git a/compiler/src/interop/src/process_module_files.ts b/compiler/src/interop/src/process_module_files.ts
index 2a8e3a07702a8b0d21cabc81dc8122521ff0a0ee..e0612314ec1a13e39fdad66a2c4d29952f021357 100644
--- a/compiler/src/interop/src/process_module_files.ts
+++ b/compiler/src/interop/src/process_module_files.ts
@@ -31,6 +31,7 @@ import {
   newSourceMaps as webpackNewSourceMaps,
   transformModuleSpecifier,
   writeObfuscatedSourceCode,
+  writeFileSyncCaseAware,
 } from './ark_utils';
 import { processSystemApi } from './validate_ui_syntax';
 import { isDebug } from './fast_build/ark_compiler/utils';
@@ -94,7 +95,7 @@ export async function writeFileSyncByNode(node: ts.SourceFile, projectConfig: Ob
     return;
   }
   mkdirsSync(path.dirname(temporaryFile));
-  fs.writeFileSync(temporaryFile, mixedInfo.content);
+  writeFileSyncCaseAware(temporaryFile, mixedInfo.content);
   stopEvent(eventWriteFileSyncByNode);
 }
 
diff --git a/compiler/src/process_module_files.ts b/compiler/src/process_module_files.ts
index 2a8e3a07702a8b0d21cabc81dc8122521ff0a0ee..e0612314ec1a13e39fdad66a2c4d29952f021357 100644
--- a/compiler/src/process_module_files.ts
+++ b/compiler/src/process_module_files.ts
@@ -31,6 +31,7 @@ import {
   newSourceMaps as webpackNewSourceMaps,
   transformModuleSpecifier,
   writeObfuscatedSourceCode,
+  writeFileSyncCaseAware,
 } from './ark_utils';
 import { processSystemApi } from './validate_ui_syntax';
 import { isDebug } from './fast_build/ark_compiler/utils';
@@ -94,7 +95,7 @@ export async function writeFileSyncByNode(node: ts.SourceFile, projectConfig: Ob
     return;
   }
   mkdirsSync(path.dirname(temporaryFile));
-  fs.writeFileSync(temporaryFile, mixedInfo.content);
+  writeFileSyncCaseAware(temporaryFile, mixedInfo.content);
   stopEvent(eventWriteFileSyncByNode);
 }